Electron Energy Loss Spectroscopy

Gilles Hug


LEM
ONERA/CNRS
BP 72, 92322 Chatillon, France

We will present the basic theory underlying the electron inelastic interaction with matter. The key features are introduced : absorption processes, cross-sections and spectral fine structures. Quantitative aspects and various processing methods for compositional or fine structure analysis (ELNES, EXELFS, ?) are described with links to electron stucture and properties. Special attention is devoted to the modeling EELS fine structures and the various theories and their limitations.